• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A pressure sensor 100 is provided with: a diaphragm 2 that is displaced when pressure is applied thereto; a first pressure receiving section 3 that generates strain when pressed by the diaphragm 2; a second pressure receiving section 4, which is pressed, together with the first pressure receiving section 3, by means of the diaphragm 2 when the strain of the first pressure receiving section 3 is equal to a predetermined value or more, and which generates strain; a first strain gage 5 that detects the strain of the first pressure receiving section 3 by being attached to the first pressure receiving section 3; and an amplifier unit 6 that calculates, on the basis of the strain of the first pressure receiving section 3, pressure applied to the diaphragm 2.
    公开号:DK202070287A8
    申请号:DKP202070287
    申请日:2020-05-05
    公开日:2020-11-03
    发明作者:Yoshida Hiroyuki；Shoji Kazuichi；Iwamoto Hironori
    申请人:Applied Electronics Corp；Kengo TOMONARI；
    IPC主号:
    专利说明:

    [0001] [0001] The present invention relates to a pressure sensor.BACKGROUND
    [0002] [0002] Japanese Unexamined Utility Model Publication No. 7-29436 discloses a cylinder pressure detection device using a strain gauge to detect a cylinder pressure of an internal combustion engine.SUMMARY
    [0003] [0003] However, a pressure sensor using a strain gauge has a problem in that if raising the upper limit of the measurement range, the precision of measurement at the low pressure region will deteriorate.
    [0004] [0004] The present invention was made focusing on such a problem and has as its object to maintain the precision of measurement at the low pressure region while raising the upper limit of the measurement range.
    [0005] [0005] To solve this problem, the pressure sensor according to the present invention comprises a diaphragm configured to displace upon receiving pressure, a first pressure receiving part configured to be generated strain by being pressed by the diaphragm, a second pressure receiving part configured to be generated strain by being pressed by the diaphragm together with the first pressure receiving part when the strain of the first pressure receiving part becomes a predetermined value or more, a first strain gauge attached to the first pressure receiving part and configured to detect a strain of the first pressure receiving part, and an amp unit configured to 1
    [0006] [0006] According to the pressure sensor according to this aspect of the present invention, it is possible to maintain the measurement precision at the low pressure region while raising the upper limit of the measurement range.BRIEF DESCRIPTION OF DRAWINGS
    [0007] [0007] FIG. 1 is a schematic perspective view of a pressure sensor according to the first embodiment of the present invention.
    [0008] [0008] Below, referring to the drawings, embodiments of the present invention will be explained in detail. Note that, in the following explanation, similar component elements are assigned the 2
    [0009] [0009] First Embodiment FIG. 1 is a schematic perspective view of a pressure sensor 100 according to the first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the pressure sensor 100 along the line II-II of FIG. 1.
    [0010] [0010] As shown in FIG. I and FIG. 2, the pressure sensor 100 according to the present embodiment comprises a housing 1, diaphragm 2, first pressure receiving part 3, second pressure receiving part 4, strain gauge 5, and amp unit 6 and detects the pressure of the gas, liquid, or other fluid being measured.
    [0011] [0011] The housing 1 is a housing having an open part at one end side in the axial direction (upper side in the figure).
    [0012] [0012] The diaphragm 2 is attached to the housing 1 so as to cover the open part of the housing
    [0013] [0013] The first pressure receiving part 3 is an object extending substantially in parallel to the axial direction of the housing 1. It is stored at the inside of the housing so that when the diaphragm 2 receives pressure P from the fluid being measured, it is pressed by the fluid being measured through the diaphragm 2 and vertical strain is generated.
    [0014] [0014] The second pressure receiving part 4 is an object extending substantially in parallel to the axial direction of the housing 1 and has a length in the axial direction of the housing shorter than the length in the axial direction of the housing of the first pressure receiving part 3. It is housed inside of the housing 1 so that when the diaphragm 2 receives pressure P from the fluid being measured, after the vertical strain e 1 of the first pressure receiving part 3 becomes a predetermined value a or more, it is pressed by the fluid being measured through the diaphragm 2 together with the first pressure receiving part 3 whereby vertical strain is generated. Note that the material of the second pressure receiving part 4 is similar to the material of the first pressure receiving part 3.
    [0015] [0015] In the present embodiment, the shape of the first pressure receiving part 3 is made a columnar shape and the shape of the second pressure receiving part 4 is made a hollow columnar 3
    [0016] [0016] The strain gauge 5 is attached to the first pressure receiving part 3 and detects the vertical strain e I of the first pressure receiving part 3. The strain gauge 5 is connected to the amp unit 6 through a sensor cable 7 and inputs an output signal corresponding to the vertical strain €1 to the amp unit 6.
    [0017] [0017] The amp unit 6 comprises an amplifier for amplifying the output signal of the strain gauge 5 or a CPU (microprocessor) for calculating the pressure P of the fluid being measured based on the output signal of the strain gauge 5 amplified by the amp unit 6 (that is, the vertical strain e 1) etc. integrally formed.
    [0018] [0018] In this way, the pressure sensor 100 according to the present embodiment is configured so that when detecting the pressure on the diaphragm 2, that is, the pressure P of the fluid being measured, based on the vertical strain e 1 of the first pressure receiving part 3, it is possible to first obtain the pressure P of the fluid being measured by the first pressure receiving part 3 then obtain the pressure P of the fluid being measured by the first pressure receiving part 3 and the second pressure receiving part 4. Below, the reason for being configured in this way will be explained.
    [0019] [0019] If designating the pressure acting on the diaphragm 2, that is, the pressure of the fluid being measured, as P, the area of the contact area 31 of the diaphragm 2 and the first pressure receiving part 3 (below, referred to as the "first contact area”) as A1, and the Young's modulus of the first pressure receiving part 3 as E1, the vertical strain €1 of the first pressure receiving part 3 can be expressed as in the following formula (1):
    [0020] [0020] el=P/(E1 Al) ...(1)
    [0021] [0021] Here, if the vertical strain el becomes a predetermined yield value €lyield or more, the first pressure receiving part 3 ends up plastically deforming, so the upper limit value Pmax of the 4
    [0022] [0022] Pyicla=elyield EL A1 ...(2)
    [0023] [0023] The yield value €lyield and the Young's modulus E1 are predetermined values determined by the material of the first pressure receiving part 3 etc., so to raise the upper limit value Pmax of the measurement range of the pressure sensor 100, it is sufficient to increase the first contact area Al.
    [0024] [0024] However, if making the first contact area A1 greater, as clear from formula (1), the rate of change of the vertical strain e 1 with respect to the pressure P of the fluid being measured becomes smaller. As a result, the sensitivity of the pressure sensor 100 with respect to changes in the pressure P of the fluid being measured ends up falling. The measurement precision of the pressure sensor 100 when the pressure P of the fluid being measured is low deteriorates. In this way, there is the problem that the pressure sensor 100 using the strain gauge 5 deteriorates in measurement precision in the low pressure region if making the upper limit of the measurement range higher.
    [0025] [0025] Therefore, in the present embodiment, the pressure sensor 100 is configured so that, first, the first pressure receiving part 3 can receive the pressure P of the fluid being measured and, when the vertical strain e I of the first pressure receiving part 3 becomes the predetermined value a or more, the first pressure receiving part 3 and the second pressure receiving part 4 can receive the pressure P of the fluid being measured.
    [0026] [0026] Due to this, as shown in FIG. 3, after the pressure P of the fluid being measured becomes higher and the vertical strain el of the first pressure receiving part 3 becomes the predetermined value a or more, the diaphragm 2 contacts the contact surface 31 of the first pressure receiving part 3 and the contact surface 41 of the second pressure receiving part 4. For this reason, if designating the area of the contact surface 41 of the diaphragm 2 and the second pressure receiving part 4 (below, referred to as the "second contact area”) as A2, the vertical strain e1 of the first pressure receiving part 3 after the vertical strain e1 becomes the predetermined value xx or more can be expressed as shown in the following formula (3):
    [0027] [0027] el=a+P/fE1 (A1+A2)) …(3)
    [0028] [0028] 5
    [0029] [0029] Therefore, according to the pressure sensor 100 according to the present embodiment, it is possible to maintain the measurement precision in the low voltage region while raising the upper limit of the measurement range.
    [0030] [0030] FIG. 4 is a view showing a relationship between a pressure acting on a diaphragm 2 of the pressure sensor 100 according to the present embodiment, that is, the pressure P of the fluid being measured, and a vertical strain e1 generated at the first pressure receiving part 3.
    [0031] [0031] As shown in FIG. 4, in the region where the vertical strain e1 of the first pressure receiving part 3 is less than the predetermined value ao (low pressure region), the diaphragm 2 contacts only the contact surface 31 of the first pressure receiving part 3, so the rate of change of the vertical strain e 1 with respect to the pressure P of the fluid being measured becomes larger. For this reason, it is possible to maintain the measurement precision at the low pressure region.
    [0032] [0032] Further, in the region where the vertical strain €1 of the first pressure receiving part 3 is the region of the predetermined value o or more (medium and high pressure region), the diaphragm 2 contacts the contact surface 31 of the first pressure receiving part 3 and the contact surface 41 of the second pressure receiving part 4, so the rate of change of the vertical strain e I with respect to the pressure P of the fluid being measured becomes smaller and as a result the upper limit of the pressure P of the fluid being measured enabling vertical strain €1 to act on the first pressure receiving part 3 through the diaphragm 2 until reaching the yield value E lyield becomes higher. For this reason, it is possible to raise the upper limit of the measurement range of the pressure sensor 100. Note that in the medium and high pressure region, there is less occurrence of fine pressure fluctuations compared with the low pressure region, so the rate of change of the vertical strain e 1 with respect to the pressure P of the fluid being measured becomes smaller, but there is little effect on the measurement precision.
    [0033] [0033] 6
    [0034] [0034] At step S1, the amp unit 6 reads the output signal of the strain gauge 5, that is, the vertical strain 1 of the first pressure receiving part 3.
    [0035] [0035] At step S2, the amp unit 6 refers to the graph of FIG. 6 showing a relationship similar to FIG. 4 prepared in advance and calculates the pressure P of the fluid being measured based on the vertical strain €1 of the first pressure receiving part 3.
    [0036] [0036] The pressure sensor 100 according to the present invention explained above comprises a diaphragm 2 configured to displace upon receiving pressure, a first pressure receiving part 3 configured to be generated vertical strain by being pressed by the diaphragm 2, a second pressure receiving part 4 configured to be generated vertical strain by being pressed by the diaphragm 2 together with the first pressure receiving part 3 when the vertical strain 1 of the first pressure receiving part 3 becomes a predetermined value a or more, a first strain gauge 5 attached to the first pressure receiving part 3 and configured to detect the vertical strain €1 of the first pressure receiving part 3, and an amp unit 6 configured to calculate a pressure acting on the diaphragm 2, that is, the pressure P of the fluid being measured, based on the vertical strain e 1 of the first pressure receiving part 3.
    [0037] [0037] Due to this, it is possible to maintain the precision of measurement at the low pressure region while raising the upper limit of the measurement range.
    [0038] [0038] Second Embodiment Next, a pressure sensor 100 according to the second embodiment of the present invention will be explained. The pressure sensor 100 according to the present embodiment differs from the first embodiment in the method of calculation of the pressure P of the fluid being measured by the amp unit 6. Below, this point of difference will be focused on in the explanation.
    [0039] [0039] In the first embodiment, to prepare the graph of FIG. 6, the relationship of the vertical strain £1 and the pressure P of the fluid being measured has to be found by experiments in advance, so more work become required and the pressure sensor 100 is liable to become expensive. Therefore, in the present embodiment, a numerical formula is used to calculate the pressure P of the fluid being measured.
    [0040] [0040] 7
    [0041] [0041] At step S21, the amp unit 6 judges if the vertical strain €1 of the first pressure receiving part 3 is the predetermined value a or less. If the vertical strain €1 is the predetermined value o or less, the amp unit 6 proceeds to the processing of step S22. On the other hand, if the vertical strain e I is larger than the predetermined value ao, the amp unit 6 proceeds to the processing of step S23.
    [0042] [0042] At step S22, the amp unit 6 calculates the pressure P of the fluid being measured based on the following formula (4) modified from formula (1):
    [0043] [0043] P=c1'E1'Al ...(4)
    [0044] [0044] At step S23, the amp unit 6 calculates the pressure P of the fluid being measured based on the following formula (5) modified from formula (3):
    [0045] [0045] P=(e1-4)fE1 (A1+A2)) ...(5)
    [0046] [0046] According to the pressure sensor 100 according to the present embodiment explained above, similar effects to the first embodiment are obtained. In addition, the work can be reduced, so the pressure sensor 100 can be made more inexpensive.
    [0047] [0047] Third Embodiment Next, a pressure sensor 100 according to a third embodiment of the present invention will be explained. The pressure sensor 100 according to the present embodiment differs from the first embodiment in the point of attachment of a strain gauge 5 to the second pressure receiving part 4 in addition to the first pressure receiving part 3 and differs from the first embodiment in the method of calculating the pressure P of the fluid being measured by the amp unit 6. Below, these points of difference will be focused on in the explanation.
    [0048] [0048] Note that, in the following explanation, to facilitate differentiation, the strain gauge attached to the first pressure receiving part 3 will be referred to as the "first strain gauge”. On the other hand, the strain gauge attached to the second pressure receiving part 4 will be referred to as the “second strain gauge”.
    [0049] [0049] 8
    [0050] [0050] As shown in FIG. 8 and FIG. 9, the pressure sensor 100 according to the present embodiment is provided with the housing 1, diaphragm 2, first pressure receiving part 3, second pressure receiving part 4, first strain gauge 5, and amp unit 6 explained in the first embodiment plus a second strain gauge 8.
    [0051] [0051] The second strain gauge 8 is attached to the second pressure receiving part 4 and detects the vertical strain €2 of the second pressure receiving part 4. The second strain gauge 8 is connected through a sensor cable to the amp unit 6 and inputs an output signal corresponding to the vertical strain €2 to the amp unit 6.
    [0052] [0052] In this regard, if the vertical strain €1 of the first pressure receiving part 3 becomes the predetermined value a due to manufacturing error or aging etc. of the first pressure receiving part 3, the diaphragm 2 is liable to no longer contact the second pressure receiving part 4. Further, conversely, before the vertical strain €1 of the first pressure receiving part 3 becomes the predetermined value a, the diaphragm 2 is liable to already end up contacting the second pressure receiving part 4.
    [0053] [0053] If such a situation occurs, with the method of calculation of the pressure P of the fluid being measured by the above-mentioned first embodiment or second embodiment, the measurement precision of the pressure P of the fluid being measured will fall in the region where the vertical strain e I takes a value close to the predetermined value a.
    [0054] [0054] Therefore, in the present embodiment, the second strain gauge 8 is attached to the second pressure receiving part 4. By attaching the second strain gauge 8 to the second pressure receiving part 4, it is possible to learn the point of time when strain occurs at the second pressure receiving part 4. That is, it is possible to learn the point of time when the diaphragm 2 contacts the second pressure receiving part 4 and the second pressure receiving part 4 starts to be pressed by the fluid being measured through the diaphragm 2.
    [0055] [0055] For this reason, in the third embodiment explained above, if changing the formula for calculation of the pressure P of the fluid being measured at the time when strain occurs at the second pressure receiving part 4, it is possible to keep the precision of measurement of the 9
    [0056] [0056] FIG. 10 is a flow chart explaining the method of calculation of the pressure P of the fluid being measured by the amp unit 6 according to the present embodiment.
    [0057] [0057] At step S31, the amp unit 6 reads the output signal of the second strain gauge 8, that is, the vertical strain £2 of the second pressure receiving part 4.
    [0058] [0058] At step S32, the amp unit 6 judges if the vertical strain €2 of the second pressure receiving part 4 is larger than zero, that is, if the diaphragm 2 has contacted the second pressure receiving part 4 and the second pressure receiving part 4 has started to be pressed against through the diaphragm 2 by the fluid being measured. If the vertical strain €2 of the second pressure receiving part 4 is zero, the amp unit 6 proceeds to the processing of step S22. On the other hand, if the vertical strain €1 is larger than the predetermined value a, the amp unit 6 proceeds to the processing of step S23.
    [0059] [0059] The pressure sensor 100 according to the present embodiment explained above is further provided with the second strain gauge 8 attached to the second pressure receiving part 4 and configured to detect vertical strain £2 (strain) of the second pressure receiving part 4. The amp unit 6 is configured so as to change the method for calculating the pressure acting on the diaphragm 2, that is, the pressure P of the fluid being measured, based on the vertical strain e2 of the second pressure receiving part 4.
    [0060] [0060] Due to this, similar effects as the above-mentioned first embodiment and second embodiment are obtained. In addition, even if the vertical strain e 1 of the first pressure receiving part 3 becomes the predetermined value a due to manufacturing error or aging etc. of the first pressure receiving part 3 and the diaphragm 2 no longer contacts the second pressure receiving part 4 or, further, conversely, the diaphragm 2 already ends up contacting the second pressure receiving part 4 before the vertical strain e1 of the first pressure receiving part 3 becomes the predetermined value a, it is possible to precisely measure the pressure P of the fluid being measured.
    [0061] [0061] Above, embodiments of the present invention were explained, but the embodiments only show some of the examples of application of the present invention. They do not limit the technical scope of the present invention to the specific constitutions of the embodiments.
    [0062] [0062] For example, in the above embodiments, two pressure receiving parts of the first pressure receiving part 3 and the second pressure receiving part 4 were provided, but it is also possible to further provide a pressure receiving part receiving the pressure P of the fluid being measured after the second pressure receiving part 4. That is, it is also possible to provide three or more pressure receiving parts receiving pressure in stages.REFERENCE SIGNS LIST
    [0063] [0063] 2 diaphragm 3 first pressure receiving part 4 second pressure receiving part 5 strain gauge (first strain gauge) 6 amp unit 8 second strain gauge 100 pressure sensor 11
    权利要求:
    Claims (2)
    [1] DK 2020 70287 A8
    CLAIMS [Claim 1] A pressure sensor comprising: a diaphragm configured to displace upon receiving pressure; a first pressure receiving part configured to be generated strain by being pressed by the diaphragm; a second pressure receiving part configured to be generated strain by being pressed by the diaphragm together with the first pressure receiving part when the strain of the first pressure receiving part becomes a predetermined value or more; a first strain gauge attached to the first pressure receiving part and configured to detect a strain of the first pressure receiving part; and an amp unit configured to calculate a pressure acting on the diaphragm based on the strain of the first pressure receiving part.
    [2] [Claim 2] The pressure sensor according to claim 1, further comprising a second strain gauge attached to the second pressure receiving part and configured to detect strain of the second pressure receiving part, wherein the amp unit is configured to change the method of calculating the pressure acting on the diaphragm based on the strain of the second pressure receiving part. 12
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    同族专利:
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    KR20200066311A|2020-06-09|
    DK202070287A1|2020-05-11|
    JPWO2019073582A1|2020-11-05|
    CN111316081B|2021-10-29|
    WO2019073582A1|2019-04-18|
    JP6793928B2|2020-12-02|
    CN111316081A|2020-06-19|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    SU555300A1|1976-01-06|1977-04-25|Предприятие П/Я А-1891|Multi-Range Dynamometer|
    JPH0729436A|1993-07-07|1995-01-31|Toshiba Corp|Gas insulated bushing|
    JPH10300602A|1997-04-25|1998-11-13|Hitachi Ltd|Semiconductor pressure sensor|
    CN106092295A|2016-01-20|2016-11-09|申俊|Improved multifunctional double rank electronic scale|
    CN106052824A|2016-01-20|2016-10-26|滁州贝腾特电器有限公司|Single-plate double-order weighing electronic scale|
    CN105938000A|2016-01-20|2016-09-14|申俊|Adjustable double-precision weighing sensor|
    法律状态:
    2020-05-11| PAT| Application published|Effective date: 20200505 |
    优先权:
    申请号 | 申请日 | 专利标题
    PCT/JP2017/037076|WO2019073582A1|2017-10-12|2017-10-12|Pressure sensor|
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